Assignee
MICHELSSON DETLEF
DE·4 granted patents·1 pending application·21 citations·filing 2004–2011
Top patents by PatentIndex Score
5 records- 0182US8200004B2Method for inspecting a surface of a wafer with regions of different detection sensitivityMICHELSSON DETLEF·Filed 2008·Granted Jun 12, 2012·9 cites·19 claims
- 0275US8200003B2Method for the optical inspection and visualization of optical measuring values obtained from disk-like objectsMICHELSSON DETLEF·Filed 2008·Granted Jun 12, 2012·5 cites·14 claims
- 0374US8705837B2Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the methodMICHELSSON DETLEF·Filed 2011·Granted Apr 22, 2014·4 cites·23 claims
- 0461US8264534B2Method and apparatus for processing the image data of the surface of a wafer recorded by at least one cameraMICHELSSON DETLEF·Filed 2008·Granted Sep 11, 2012·3 cites·19 claims
- 0537US2006240580A1Method for evaluating reproduced images of wafersMICHELSSON DETLEF·Filed 2004·Application pending·0 cites
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