Assignee
MFC SEALING TECH CO LTD
TW·2 granted patents·0 citations·filing 2015–2016
Top patents by PatentIndex Score
2 records- 0128US10529611B2Barrier seal for electrostatic chuckMFC SEALING TECH CO LTD·Filed 2016·Granted Jan 7, 2020·0 cites·8 claims
- 0227US10153140B2Method of installing elastomer ring in semiconductor processing equipment and guiding sheet and jig used in installing elastomer ringMFC SEALING TECH CO LTD·Filed 2015·Granted Dec 11, 2018·0 cites·22 claims
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