Assignee
METROSOL INC
US·18 granted patents·1 pending application·416 citations·filing 2003–2008
Top patents by PatentIndex Score
19 records- 0195US7391030B2Broad band referencing reflectometerMETROSOL INC·Filed 2007·Granted Jun 24, 2008·19 cites·82 claims
- 0295US7189973B2Vacuum ultraviolet reflectometer integrated with processing systemMETROSOL INC·Filed 2006·Granted Mar 13, 2007·26 cites·32 claims
- 0395US7126131B2Broad band referencing reflectometerMETROSOL INC·Filed 2004·Granted Oct 24, 2006·52 cites·38 claims
- 0494US7342235B1Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Mar 11, 2008·32 cites·42 claims
- 0594US7271394B2Vacuum ultraviolet reflectometer having collimated beamMETROSOL INC·Filed 2006·Granted Sep 18, 2007·19 cites·43 claims
- 0694US7067818B2Vacuum ultraviolet reflectometer system and methodMETROSOL INC·Filed 2003·Granted Jun 27, 2006·67 cites·70 claims
- 0792US7684037B2Spectrometer with collimated input lightMETROSOL INC·Filed 2007·Granted Mar 23, 2010·28 cites·30 claims
- 0892US7485869B2Prism spectrometerMETROSOL INC·Filed 2007·Granted Feb 3, 2009·28 cites·36 claims
- 0989US7446876B2Vacuum ultra-violet reflectometer with stray light correctionMETROSOL INC·Filed 2006·Granted Nov 4, 2008·11 cites·40 claims
- 1089US7282703B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Oct 16, 2007·17 cites·17 claims
- 1187US7026626B2Semiconductor processing techniques utilizing vacuum ultraviolet reflectometerMETROSOL INC·Filed 2003·Granted Apr 11, 2006·38 cites·32 claims
- 1286US7579601B2Spectrometer with moveable detector elementMETROSOL INC·Filed 2007·Granted Aug 25, 2009·16 cites·34 claims
- 1386US7511265B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2006·Granted Mar 31, 2009·11 cites·41 claims
- 1484US7394551B2Vacuum ultraviolet referencing reflectometerMETROSOL INC·Filed 2003·Granted Jul 1, 2008·25 cites·28 claims
- 1575US7399975B2Method and apparatus for performing highly accurate thin film measurementsMETROSOL INC·Filed 2004·Granted Jul 15, 2008·19 cites·26 claims
- 1668US7663747B2Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Feb 16, 2010·2 cites·14 claims
- 1768US7622310B2Contamination monitoring and control techniques for use with an optical metrology instrumentMETROSOL INC·Filed 2006·Granted Nov 24, 2009·2 cites·67 claims
- 1864US7663097B2Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurementMETROSOL INC·Filed 2007·Granted Feb 16, 2010·4 cites·82 claims
- 1950US2009002711A1Broad band referencing reflectometerMETROSOL INC·Filed 2008·Application pending·0 cites
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