Assignee
MEMX INC
US·39 granted patents·1 pending application·625 citations·filing 2001–2004
Top patents by PatentIndex Score
40 records- 0195US6756317B2Method for making a microstructure by surface micromachiningMEMX INC·Filed 2001·Granted Jun 29, 2004·78 cites·76 claims
- 0294US6778306B2Surface micromachined optical system with reinforced mirror microstructureMEMX INC·Filed 2003·Granted Aug 17, 2004·81 cites·21 claims
- 0393US6864618B2Method for operating a microelectromechanical system using a stiff couplingMEMX INC·Filed 2003·Granted Mar 8, 2005·57 cites·11 claims
- 0492US6640023B2Single chip optical cross connectMEMX INC·Filed 2001·Granted Oct 28, 2003·62 cites·74 claims
- 0587US6707176B1Non-linear actuator suspension for microelectromechanical systemsMEMX INC·Filed 2002·Granted Mar 16, 2004·68 cites·86 claims
- 0680US6600587B2Surface micromachined optical system with reinforced mirror microstructureMEMX INC·Filed 2001·Granted Jul 29, 2003·31 cites·29 claims
- 0779US6703675B1Particle filter for partially enclosed microelectromechanical systemsMEMX INC·Filed 2002·Granted Mar 9, 2004·34 cites·30 claims
- 0879US6650806B2Compliant push/pull connector microstructureMEMX INC·Filed 2002·Granted Nov 18, 2003·21 cites·55 claims
- 0975US6993818B2Multi-fixture assembly of cutting toolsMEMX INC·Filed 2003·Granted Feb 7, 2006·25 cites·72 claims
- 1072US6954348B1Tunable MEMS capacitorMEMX INC·Filed 2004·Granted Oct 11, 2005·18 cites·31 claims
- 1171US6747340B2Multi-level shielded multi-conductor interconnect bus for MEMSMEMX INC·Filed 2002·Granted Jun 8, 2004·16 cites·28 claims
- 1268US6844657B2Microelectromechanical system and method for producing displacement multiplicationMEMX INC·Filed 2002·Granted Jan 18, 2005·20 cites·51 claims
- 1368US6731513B2Shielded multi-conductor interconnect bus for MEMSMEMX INC·Filed 2002·Granted May 4, 2004·13 cites·36 claims
- 1466US6665104B2Mirror positioning assembly with vertical force component compensationMEMX INC·Filed 2002·Granted Dec 16, 2003·10 cites·32 claims
- 1563US6875257B2Particle filter for microelectromechanical systemsMEMX INC·Filed 2002·Granted Apr 5, 2005·11 cites·27 claims
- 1662US6791730B2Surface micromachined optical system with reinforced mirror microstructureMEMX INC·Filed 2003·Granted Sep 14, 2004·9 cites·42 claims
- 1761US6824278B2Self-shadowing MEM structuresMEMX INC·Filed 2002·Granted Nov 30, 2004·6 cites·11 claims
- 1859US6847152B2Microelectromechnical system for tilting a platformMEMX INC·Filed 2003·Granted Jan 25, 2005·6 cites·10 claims
- 1957US6637901B2Mirror assembly with elevator lifterMEMX INC·Filed 2002·Granted Oct 28, 2003·8 cites·14 claims
- 2053US6937131B2Self-shadowing MEM structuresMEMX INC·Filed 2004·Granted Aug 30, 2005·3 cites·4 claims
- 2153US6831391B2Microelectromechanical system for tilting a platformMEMX INC·Filed 2003·Granted Dec 14, 2004·4 cites·26 claims
- 2253US6707077B2Chip interconnect busMEMX INC·Filed 2002·Granted Mar 16, 2004·4 cites·45 claims
- 2352US6944365B2Off axis optical signal redirection architecturesMEMX INC·Filed 2002·Granted Sep 13, 2005·4 cites·54 claims
- 2451US6989582B2Method for making a multi-die chipMEMX INC·Filed 2003·Granted Jan 24, 2006·4 cites·21 claims
- 2550US6894420B2Non-linear actuator suspension for microelectromechanical systemsMEMX INC·Filed 2002·Granted May 17, 2005·5 cites·36 claims
- 2650US6727436B2Interconnect bus crossover for MEMSMEMX INC·Filed 2002·Granted Apr 27, 2004·4 cites·25 claims
- 2749US6700173B1Electrically isolated support for overlying MEM structureMEMX INC·Filed 2002·Granted Mar 2, 2004·3 cites·13 claims
- 2848US7055975B2Microelectromechanical system with non-collinear force compensationMEMX INC·Filed 2002·Granted Jun 6, 2006·2 cites·73 claims
- 2948US6813057B2Configurations for an optical crossconnect switchMEMX INC·Filed 2001·Granted Nov 2, 2004·2 cites·60 claims
- 3048US6778305B2Surface micromachined optical system with reinforced mirror microstructureMEMX INC·Filed 2003·Granted Aug 17, 2004·2 cites·48 claims
- 3148US6706619B2Method for tiling unit cellsMEMX INC·Filed 2002·Granted Mar 16, 2004·2 cites·39 claims
- 3248US6621681B2Low voltage control of MEM actuatorsMEMX INC·Filed 2001·Granted Sep 16, 2003·2 cites·40 claims
- 3347US6841464B2Multi-level shielded multi-conductor interconnect bus for MEMSMEMX INC·Filed 2003·Granted Jan 11, 2005·2 cites·8 claims
- 3446US6831390B2Microelectromechanical system with stiff couplingMEMX INC·Filed 2002·Granted Dec 14, 2004·2 cites·26 claims
- 3546US6774535B2Micromechanical platform pivotal on a compliant memberMEMX INC·Filed 2003·Granted Aug 10, 2004·2 cites·8 claims
- 3645US6791162B2Unit cell architecture for electrical interconnectsMEMX INC·Filed 2002·Granted Sep 14, 2004·2 cites·30 claims
- 3744US6808275B2Mirror assembly with elevator lifterMEMX INC·Filed 2003·Granted Oct 26, 2004·1 cites·15 claims
- 3844US2004204726A1Separating a microkeratome blade from a waferMEMX INC·Filed 2003·Application pending·0 cites
- 3943US6794793B2Microelectromechnical system for tilting a platformMEMX INC·Filed 2001·Granted Sep 21, 2004·1 cites·37 claims
- 4036US6919616B2Chip with passive electrical contactsMEMX INC·Filed 2002·Granted Jul 19, 2005·0 cites·47 claims
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