Assignee
MATSUMOTO HIRONOBU
JP·2 granted patents·5 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0173US8791432B2Charged particle beam writing apparatus and charged particle beam writing methodMATSUMOTO HIRONOBU·Filed 2011·Granted Jul 29, 2014·3 cites·11 claims
- 0264US9218942B2Charged particle beam writing apparatus and charged particle beam writing methodMATSUMOTO HIRONOBU·Filed 2011·Granted Dec 22, 2015·2 cites·8 claims
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