Assignee
MACHIDA EISAKU
JP·2 granted patents·1 pending application·4 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0163US8744614B2Substrate processing apparatus, and substrate transport methodMACHIDA EISAKU·Filed 2011·Granted Jun 3, 2014·3 cites·16 claims
- 0254US9022046B2Substrate processing apparatus and substrate processing method for successively processing a plurality of substratesMACHIDA EISAKU·Filed 2012·Granted May 5, 2015·1 cites·6 claims
- 0344US2009252578A1Substrate processing apparatus and substrate processing method for successively processing a plurality of substratesMACHIDA EISAKU·Filed 2009·Application pending·0 cites
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