Assignee
M E C TECHNOLOGY INC
US·4 granted patents·330 citations·filing 1998–2000
Top patents by PatentIndex Score
4 records- 0193US6237528B1Showerhead electrode assembly for plasma processingM E C TECHNOLOGY INC·Filed 2000·Granted May 29, 2001·81 cites·19 claims
- 0293US6170432B1Showerhead electrode assembly for plasma processingM E C TECHNOLOGY INC·Filed 2000·Granted Jan 9, 2001·92 cites·16 claims
- 0387US6050216AShowerhead electrode for plasma processingM E C TECHNOLOGY INC·Filed 1998·Granted Apr 18, 2000·101 cites·18 claims
- 0477US6244641B1Wafer transfer armM E C TECHNOLOGY INC·Filed 1999·Granted Jun 12, 2001·56 cites·37 claims
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