Assignee
LUCAS NOVASENSOR
US·6 granted patents·452 citations·filing 1991–1997
Top patents by PatentIndex Score
6 records- 0195US5355712AMethod and apparatus for thermally actuated self testing of silicon structuresLUCAS NOVASENSOR·Filed 1991·Granted Oct 18, 1994·121 cites·13 claims
- 0292US5461922APressure sensor isolated within housing having integral diaphragm and method of making sameLUCAS NOVASENSOR·Filed 1993·Granted Oct 31, 1995·89 cites·23 claims
- 0391US5231301ASemiconductor sensor with piezoresistors and improved electrostatic structuresLUCAS NOVASENSOR·Filed 1991·Granted Jul 27, 1993·83 cites·23 claims
- 0490US6038928AMiniature gauge pressure sensor using silicon fusion bonding and back etchingLUCAS NOVASENSOR·Filed 1997·Granted Mar 21, 2000·87 cites·23 claims
- 0576US6316796B1Single crystal silicon sensor with high aspect ratio and curvilinear structuresLUCAS NOVASENSOR·Filed 1996·Granted Nov 13, 2001·32 cites·54 claims
- 0676US6084257ASingle crystal silicon sensor with high aspect ratio and curvilinear structuresLUCAS NOVASENSOR·Filed 1995·Granted Jul 4, 2000·40 cites·39 claims
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