Assignee
LU XINCHUN
CN·4 granted patents·3 pending applications·10 citations·filing 2011–2011
Top patents by PatentIndex Score
7 records- 0178US9138857B2Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the sameLU XINCHUN·Filed 2011·Granted Sep 22, 2015·8 cites·14 claims
- 0256US8912790B2Measuring device for measuring film thickness of silicon waferLU XINCHUN·Filed 2011·Granted Dec 16, 2014·2 cites·17 claims
- 0338US9255780B2Method for measuring thickness of film on wafer edgeLU XINCHUN·Filed 2011·Granted Feb 9, 2016·0 cites·12 claims
- 0437US9377286B2Device for globally measuring thickness of metal filmLU XINCHUN·Filed 2011·Granted Jun 28, 2016·0 cites·5 claims
- 0534US2012115403A1Pad conditioner head for conditioning a polishing padLU XINCHUN·Filed 2011·Application pending·0 cites
- 0634US2012315826A1Device and Method for Measuring Physical Parameters of Slurry and Chemical Mechanical Polishing Apparatus Comprising the DeviceLU XINCHUN·Filed 2011·Application pending·0 cites
- 0728US2013273819A1Wafer transfer device for chemical mechanical polishing apparatusLU XINCHUN·Filed 2011·Application pending·0 cites
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