Assignee
LONG MAOLIN
US·6 granted patents·27 citations·filing 2010–2012
Top patents by PatentIndex Score
6 records- 0191US9966236B2Powered grid for plasma chamberLONG MAOLIN·Filed 2011·Granted May 8, 2018·13 cites·20 claims
- 0287US9293353B2Faraday shield having plasma density decoupling structure between TCP coil zonesLONG MAOLIN·Filed 2012·Granted Mar 22, 2016·8 cites·10 claims
- 0378US8736175B2Current control in plasma processing systemsLONG MAOLIN·Filed 2010·Granted May 27, 2014·4 cites·21 claims
- 0468US9305750B2Adjusting current ratios in inductively coupled plasma processing systemsLONG MAOLIN·Filed 2010·Granted Apr 5, 2016·2 cites·14 claims
- 0547US9336996B2Plasma processing systems including side coils and methods related to the plasma processing systemsLONG MAOLIN·Filed 2011·Granted May 10, 2016·0 cites·15 claims
- 0637US8742666B2Radio frequency (RF) power filters and plasma processing systems including RF power filtersLONG MAOLIN·Filed 2010·Granted Jun 3, 2014·0 cites·14 claims
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