Assignee
LIN BURN JENG
TW·10 granted patents·2 pending applications·54 citations·filing 2006–2013
Top patents by PatentIndex Score
12 records- 0197US9046789B2Immersion lithography system using a sealed wafer bathLIN BURN JENG·Filed 2012·Granted Jun 2, 2015·12 cites·20 claims
- 0296US8767178B2Immersion lithography system using direction-controlling fluid inletsLIN BURN JENG·Filed 2012·Granted Jul 1, 2014·21 cites·17 claims
- 0394US8208116B2Immersion lithography system using a sealed wafer bathLIN BURN JENG·Filed 2007·Granted Jun 26, 2012·17 cites·28 claims
- 0482US8762899B2Method for metal correlated via split for double patterningLIN BURN JENG·Filed 2013·Granted Jun 24, 2014·4 cites·20 claims
- 0557US8693115B2Apparatus for method for immersion lithographyLIN BURN-JENG·Filed 2011·Granted Apr 8, 2014·0 cites·19 claims
- 0657US8659843B2Apparatus for method for immersion lithographyLIN BURN-JENG·Filed 2011·Granted Feb 25, 2014·0 cites·18 claims
- 0754US9330933B2Method and apparatus for planarizing a polymer layerLIN BURN JENG·Filed 2008·Granted May 3, 2016·0 cites·23 claims
- 0853US8563198B2Device and method for providing wavelength reduction with a photomaskLIN BURN JENG·Filed 2011·Granted Oct 22, 2013·0 cites·21 claims
- 0953US2012038894A1Lens Cleaning ModuleLIN BURN-JENG·Filed 2011·Application pending·0 cites
- 1046US8179516B2Protective layer on objective lens for liquid immersion lithography applicationsLIN BURN JENG·Filed 2006·Granted May 15, 2012·0 cites·26 claims
- 1145US8688254B2Multiple tools using a single data processing unitLIN BURN JENG·Filed 2007·Granted Apr 1, 2014·0 cites·18 claims
- 1239US2013293858A1Anisotropic phase shifting maskLIN BURN JENG·Filed 2012·Application pending·0 cites
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