Assignee
LIN BENJAMIN SZU-MIN
0 granted patents·8 pending applications·0 citations·filing 2004–2006
Top patents by PatentIndex Score
8 records- 0144US2008160459A1Method of forming a patternLIN BENJAMIN SZU-MIN·Filed 2006·Application pending·0 cites
- 0243US2007224545A1Method for immersion lithographyLIN BENJAMIN SZU-MIN·Filed 2006·Application pending·0 cites
- 0342US2007190805A1Method for improving the alignment accuracy of semiconductor process and method of forming openingLIN BENJAMIN SZU-MIN·Filed 2006·Application pending·0 cites
- 0441US2007182948A1Semiconductor exposure method and method of controlling semiconductor exposure apparatusLIN BENJAMIN SZU-MIN·Filed 2006·Application pending·0 cites
- 0541US2006257795A1Method for forming composite pattern including different types of patternsLIN BENJAMIN SZU-MIN·Filed 2005·Application pending·0 cites
- 0641US2006191863A1Method for fabricating etch mask and patterning process using the sameLIN BENJAMIN SZU-MIN·Filed 2005·Application pending·0 cites
- 0740US2006133222A1Lithography methodLIN BENJAMIN SZU-MIN·Filed 2004·Application pending·0 cites
- 0840US2006194142A1Immersion lithography without using a topcoatLIN BENJAMIN SZU-MIN·Filed 2005·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →