Assignee
LI YICHENG
US·1 granted patent·2 pending applications·376 citations·filing 2004–2012
Top patents by PatentIndex Score
3 records- 0196US8454749B2Method and system for sealing a first assembly to a second assembly of a processing systemLI YICHENG·Filed 2005·Granted Jun 4, 2013·376 cites·26 claims
- 0261US2012315404A1Apparatus for thermal and plasma enhanced vapor deposition and method of operatingLI YICHENG·Filed 2012·Application pending·0 cites
- 0344US2006130757A1Apparatus for active dispersion of precursorsLI YICHENG·Filed 2004·Application pending·0 cites
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