Assignee
LEGACY SYSTEMS INC
US·5 granted patents·592 citations·filing 1993–1997
Top patents by PatentIndex Score
5 records- 0190US5911837AProcess for treatment of semiconductor wafers in a fluidLEGACY SYSTEMS INC·Filed 1997·Granted Jun 15, 1999·136 cites·8 claims
- 0290US5776296AApparatus for the treatment of semiconductor wafers in a fluidLEGACY SYSTEMS INC·Filed 1995·Granted Jul 7, 1998·108 cites·11 claims
- 0390US5464480AProcess and apparatus for the treatment of semiconductor wafers in a fluidLEGACY SYSTEMS INC·Filed 1993·Granted Nov 7, 1995·212 cites·19 claims
- 0489US5727578AApparatus for the treatment and drying of semiconductor wafers in a fluidLEGACY SYSTEMS INC·Filed 1996·Granted Mar 17, 1998·99 cites·12 claims
- 0560US5429251ASemiconductor wafer end effectorLEGACY SYSTEMS INC·Filed 1993·Granted Jul 4, 1995·37 cites·10 claims
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