Assignee
LEE HSIN-CHANG
TW·5 granted patents·120 citations·filing 2012–2012
Top patents by PatentIndex Score
5 records- 0198US8679707B2Method of fabricating a lithography maskLEE HSIN-CHANG·Filed 2012·Granted Mar 25, 2014·86 cites·20 claims
- 0292US8589828B2Reduce mask overlay error by removing film deposited on blank of maskLEE HSIN-CHANG·Filed 2012·Granted Nov 19, 2013·29 cites·20 claims
- 0387US8916482B2Method of making a lithography maskLEE HSIN-CHANG·Filed 2012·Granted Dec 23, 2014·5 cites·12 claims
- 0456US8962222B2Photomask and method for forming the sameLEE HSIN-CHANG·Filed 2012·Granted Feb 24, 2015·0 cites·20 claims
- 0545US8656318B2System and method for combined intraoverlay metrology and defect inspectionLEE HSIN-CHANG·Filed 2012·Granted Feb 18, 2014·0 cites·19 claims
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