Assignee
LARSON DEAN J
US·6 granted patents·1 pending application·74 citations·filing 2005–2012
Top patents by PatentIndex Score
7 records- 0195US8313611B2Gas switching section including valves having different flow coefficients for gas distribution systemLARSON DEAN J·Filed 2011·Granted Nov 20, 2012·20 cites·6 claims
- 0294US8088248B2Gas switching section including valves having different flow coefficients for gas distribution systemLARSON DEAN J·Filed 2006·Granted Jan 3, 2012·30 cites·10 claims
- 0389US8449786B2Film adhesive for semiconductor vacuum processing apparatusLARSON DEAN J·Filed 2008·Granted May 28, 2013·15 cites·16 claims
- 0485US8084705B2Quartz guard ring centering featuresLARSON DEAN J·Filed 2010·Granted Dec 27, 2011·6 cites·12 claims
- 0563US9151408B2Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architectureLARSON DEAN J·Filed 2012·Granted Oct 6, 2015·2 cites·20 claims
- 0663US8801892B2Uniform etch systemLARSON DEAN J·Filed 2008·Granted Aug 12, 2014·1 cites·7 claims
- 0741US2007021935A1Methods for verifying gas flow rates from a gas supply system into a plasma processing chamberLARSON DEAN J·Filed 2005·Application pending·0 cites
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