Assignee
KSM COMPONENT CO LTD
KR·11 granted patents·3 pending applications·29 citations·filing 2013–2024
Top patents by PatentIndex Score
14 records- 0176US11251061B2Electrostatic chuck and manufacturing method thereforKSM COMPONENT CO LTD·Filed 2019·Granted Feb 15, 2022·2 cites·6 claims
- 0274US12476093B2Ceramic susceptor having hybrid coatingKSM COMPONENT CO LTD·Filed 2024·Granted Nov 18, 2025·0 cites·11 claims
- 0372USD1013750SCeramic heaterKSM COMPONENT CO LTD·Filed 2021·Granted Feb 6, 2024·5 cites·1 claims
- 0472USD1012998SCeramic heaterKSM COMPONENT CO LTD·Filed 2021·Granted Jan 30, 2024·5 cites·1 claims
- 0572USD1012997SCeramic heaterKSM COMPONENT CO LTD·Filed 2021·Granted Jan 30, 2024·5 cites·1 claims
- 0670US12404215B2Ceramic susceptor and manufacturing method thereofKSM COMPONENT CO LTD·Filed 2024·Granted Sep 2, 2025·0 cites·10 claims
- 0767USD849810SCeramic heaterKSM COMPONENT CO LTD·Filed 2016·Granted May 28, 2019·12 cites·1 claims
- 0854US2024430989A1Ceramic heater for semiconductor manufacturing apparatusKSM COMPONENT CO LTD·Filed 2022·Application pending·0 cites
- 0950US11456158B2Ceramic structure for plasma processing apparatus and manufacturing method thereofKSM COMPONENT CO LTD·Filed 2020·Granted Sep 27, 2022·0 cites·20 claims
- 1050US11355377B2Electrostatic chuckKSM COMPONENT CO LTD·Filed 2018·Granted Jun 7, 2022·0 cites·8 claims
- 1147US2021360748A1Plate type heater and manufacturing method thereofKSM COMPONENT CO LTD·Filed 2021·Application pending·0 cites
- 1243US10004113B2Heating wire arrangement for ceramic heaterKSM COMPONENT CO LTD·Filed 2013·Granted Jun 19, 2018·0 cites·3 claims
- 1342US2021285104A1Ceramic shower head and chemical vapor deposition device including sameKSM COMPONENT CO LTD·Filed 2019·Application pending·0 cites
- 1436USD1065275SCeramic heaterKSM COMPONENT CO LTD·Filed 2021·Granted Mar 4, 2025·0 cites·1 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →