Assignee
KOUNO DAITA
JP·2 granted patents·1 citations·filing 2007–2008
Top patents by PatentIndex Score
2 records- 0157US8431332B2Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist patternKOUNO DAITA·Filed 2008·Granted Apr 30, 2013·1 cites·6 claims
- 0239US8507189B2Upper layer film forming composition and method of forming photoresist patternKOUNO DAITA·Filed 2007·Granted Aug 13, 2013·0 cites·3 claims
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