Assignee
KOREA TECHNO CO LTD
KR·1 granted patent·1 pending application·1 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0151US7975996B2Scan stage for semiconductor wafer pollutant measurement apparatusKOREA TECHNO CO LTD·Filed 2008·Granted Jul 12, 2011·1 cites·8 claims
- 0236US2009249863A1Vapor phase decomposition device for semiconductor wafer pollutant measurement apparatus and door opening and closing deviceKOREA TECHNO CO LTD·Filed 2008·Application pending·0 cites
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