Assignee
KONO TAKUYA
0 granted patents·6 pending applications·0 citations·filing 2005–2011
Top patents by PatentIndex Score
6 records- 0150US2009296054A1Immersion lithography methodKONO TAKUYA·Filed 2009·Application pending·0 cites
- 0247US2009148782A1Exposure method, photo mask, and reticle stageKONO TAKUYA·Filed 2008·Application pending·0 cites
- 0345US2008204685A1Exposure apparatus, exposure method and lithography systemKONO TAKUYA·Filed 2008·Application pending·0 cites
- 0443US2007096764A1Immersion exposure apparatus and method of manufacturing semiconductor deviceKONO TAKUYA·Filed 2006·Application pending·0 cites
- 0542US2012061875A1Template chuck, imprint apparatus, and pattern forming methodKONO TAKUYA·Filed 2011·Application pending·0 cites
- 0641US2006001846A1Exposure system and method for manufacturing semiconductor deviceKONO TAKUYA·Filed 2005·Application pending·0 cites
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