Assignee
KONDOH TAKEHIRO
JP·2 granted patents·4 pending applications·9 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0179US8097398B2Method for manufacturing semiconductor deviceKONDOH TAKEHIRO·Filed 2009·Granted Jan 17, 2012·8 cites·20 claims
- 0259US8148054B2Immersion multiple-exposure method and immersion exposure system for separately performing multiple exposure of micropatterns and non-micropatternsKONDOH TAKEHIRO·Filed 2008·Granted Apr 3, 2012·1 cites·10 claims
- 0344US2012154771A1Immersion multiple-exposure method and immersion exposure system for separately performing multiple exposure of micropatterns and non-micropatternsKONDOH TAKEHIRO·Filed 2012·Application pending·0 cites
- 0442US2008138746A1Pattern formation method using fine pattern formation material for use in semiconductor fabrication stepKONDOH TAKEHIRO·Filed 2007·Application pending·0 cites
- 0542US2008289656A1Substrate processing method and substrate processing apparatusKONDOH TAKEHIRO·Filed 2008·Application pending·0 cites
- 0640US2007010028A1Chemical solution qualification method, semiconductor device fabrication method, and liquid crystal display manufacturing methodKONDOH TAKEHIRO·Filed 2006·Application pending·0 cites
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