Assignee
KONDOH KEISUKE
JP·4 granted patents·31 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0187US8395136B2Positional deviation detection apparatus and process system employing the sameKONDOH KEISUKE·Filed 2008·Granted Mar 12, 2013·13 cites·12 claims
- 0282US8326468B2Substrate transfer apparatus, substrate transfer module, substrate transfer method and computer readable storage mediumKONDOH KEISUKE·Filed 2008·Granted Dec 4, 2012·8 cites·14 claims
- 0381US8280545B2Vacuum processing apparatus and method, and storage medium for executing the methodKONDOH KEISUKE·Filed 2008·Granted Oct 2, 2012·8 cites·11 claims
- 0470US8740535B2Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage mediumKONDOH KEISUKE·Filed 2011·Granted Jun 3, 2014·2 cites·6 claims
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