Assignee
KOMICO LTD
KR·9 granted patents·17 pending applications·10 citations·filing 2005–2025
Top patents by PatentIndex Score
26 records- 0180US7473661B2Method for preparing a sintered body of aluminum nitrideKOMICO LTD·Filed 2008·Granted Jan 6, 2009·7 cites·5 claims
- 0275US2025297350A1Method of forming plasma-resistant coating layer with low brightness using heat treatment process of rare-earth metal compound powder and plasma-resistant coating film formed therebyKOMICO LTD·Filed 2025·Application pending·0 cites
- 0373US12378654B2Method of forming plasma-resistant coating layer with low brightness using heat treatment process of rare-earth metal compound powderKOMICO LTD·Filed 2023·Granted Aug 5, 2025·0 cites·6 claims
- 0472US12018385B2Material for plasma spray comprising Y—O—F compound, method for producing the same, and spray coating prepared using the sameKOMICO LTD·Filed 2023·Granted Jun 25, 2024·0 cites·5 claims
- 0570US7375045B2High dense sintered body of aluminum nitride, method for preparing the same and member for manufacturing semiconductor using the sintered bodyKOMICO LTD·Filed 2006·Granted May 20, 2008·3 cites·4 claims
- 0666US11560319B1Manufacturing method for spherical YOF-based powder, and spherical YOF-based powder and YOF-based coating layer manufactured therebyKOMICO LTD·Filed 2022·Granted Jan 24, 2023·0 cites·9 claims
- 0764US2024229216A1Method for manufacturing thermal spray coating and yttrium-based thermal spray coating manufactured by the sameKOMICO LTD·Filed 2023·Application pending·0 cites
- 0863US2024076770A1Yttrium-based powder for thermal spraying and yttrium-based thermal spray coating using the sameKOMICO LTD·Filed 2023·Application pending·0 cites
- 0961US11795547B2Method of aerosol deposition coating for plasma resistant coatingKOMICO LTD·Filed 2018·Granted Oct 24, 2023·0 cites·5 claims
- 1061US2025171885A1Sprayed coating containing yttrium aluminate, plasma-resistant member comprising same, and manufacturing methods thereofKOMICO LTD·Filed 2024·Application pending·0 cites
- 1160US2025389044A1Electrolyte for forming anodic oxide film, method of forming anodic oxide film, and anodic oxide film and member for semiconductor device manufactured therebyKOMICO LTD·Filed 2025·Application pending·0 cites
- 1260US2025257441A1Method for manufacturing high-density yttria film by atmospheric plasma spraying method and yttria thermal-sprayed film manufactured using sameKOMICO LTD·Filed 2024·Application pending·0 cites
- 1358US12265010B2Particle measuring deviceKOMICO LTD·Filed 2022·Granted Apr 1, 2025·0 cites·13 claims
- 1458US11473181B2Yittrium granular powder for thermal spray and thermal spray coating produced using the sameKOMICO LTD·Filed 2021·Granted Oct 18, 2022·0 cites·5 claims
- 1558US2024124967A1Method of forming plasma-resistant coating filmKOMICO LTD·Filed 2023·Application pending·0 cites
- 1655US2023062876A1Method of manufacturing high-density yf3 coating layer by using hvof, and high-density yf3 coating layer manufactured through sameKOMICO LTD·Filed 2022·Application pending·0 cites
- 1754US2023021394A1Method for large surface coating base on control of thin film stress and coating structure useofKOMICO LTD·Filed 2021·Application pending·0 cites
- 1852US2023128726A1Method of manufacturing plasma-resistant coating filmKOMICO LTD·Filed 2022·Application pending·0 cites
- 1946US2022186355A1Method of producing thermal spray coating using the yittrium powder and the yittrium coating produced by the mothodKOMICO LTD·Filed 2021·Application pending·0 cites
- 2042US11827975B2Photoplasma etching apparatus having improved plasma-resistant and manufacturing method therefor using a thermal diffusion phenomenon of a rare-earth metal thin filmKOMICO LTD·Filed 2018·Granted Nov 28, 2023·0 cites·6 claims
- 2138US2020248316A1Method of manufacturing plasma-resistant coating film and plasma-resistant member formed therebyKOMICO LTD·Filed 2018·Application pending·0 cites
- 2237US2007023694A1Method of removing particles on an object, apparatus for performing the removing method, method of measuring particles on an object and apparatus for performing the measuring methodKOMICO LTD·Filed 2006·Application pending·0 cites
- 2337US2020354850A1Method for manufacturing anodized aluminum or aluminum alloy member having excellent corrosion resistance and insulation characteristics, and surface-treated semiconductor deviceKOMICO LTD·Filed 2018·Application pending·0 cites
- 2436US2006016554A1Substrate holder having electrostatic chuck and method of fabricating the sameKOMICO LTD·Filed 2005·Application pending·0 cites
- 2533US2007023065A1Method of removing particles on an object, apparatus for performing the removing method, method of measuring particles on an object and apparatus for performing the measuring methodKOMICO LTD·Filed 2006·Application pending·0 cites
- 2626US2018135157A1Plasma resistant coating film and fabricating method thereofKOMICO LTD·Filed 2016·Application pending·0 cites
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