Assignee
KOMATSU ELECTRONICS METALS CO
JP·7 granted patents·92 citations·filing 1996–1999
Top patents by PatentIndex Score
7 records- 0160US5911823AMethod for pulling a single-crystal semiconductorKOMATSU ELECTRONICS METALS CO·Filed 1996·Granted Jun 15, 1999·34 cites·10 claims
- 0253US5953620AMethod for fabricating a bonded SOI waferKOMATSU ELECTRONICS METALS CO·Filed 1996·Granted Sep 14, 1999·23 cites·8 claims
- 0349US6315827B1Apparatus for producing single crystalKOMATSU ELECTRONICS METALS CO·Filed 1999·Granted Nov 13, 2001·9 cites·19 claims
- 0441US5943549AMethod of evaluating silicon wafersKOMATSU ELECTRONICS METALS CO·Filed 1997·Granted Aug 24, 1999·12 cites·5 claims
- 0538US5885054ACarrying device for semiconductor wafersKOMATSU ELECTRONICS METALS CO·Filed 1997·Granted Mar 23, 1999·7 cites·14 claims
- 0632US6019842AMethod and apparatus for loading raw material into a quartz crucibleKOMATSU ELECTRONICS METALS CO·Filed 1998·Granted Feb 1, 2000·3 cites·6 claims
- 0725US6054388AApparatus for lapping semiconductor wafers and method of lapping thereofKOMATSU ELECTRONICS METALS CO·Filed 1997·Granted Apr 25, 2000·4 cites·11 claims
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