Assignee
KOELMEL BLAKE
US·10 granted patents·2 pending applications·121 citations·filing 2007–2012
Top patents by PatentIndex Score
12 records- 0197US8057602B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2008·Granted Nov 15, 2011·63 cites·30 claims
- 0294US8744250B2Edge ring for a thermal processing chamberKOELMEL BLAKE·Filed 2011·Granted Jun 3, 2014·13 cites·7 claims
- 0388US8057601B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2007·Granted Nov 15, 2011·11 cites·49 claims
- 0487US8434937B2Method and apparatus for detecting the substrate temperature in a laser anneal systemKOELMEL BLAKE·Filed 2009·Granted May 7, 2013·11 cites·24 claims
- 0585US9245786B2Apparatus and methods for positioning a substrate using capacitive sensorsKOELMEL BLAKE·Filed 2011·Granted Jan 26, 2016·8 cites·17 claims
- 0685US8388853B2Non-contact substrate processingKOELMEL BLAKE·Filed 2010·Granted Mar 5, 2013·6 cites·6 claims
- 0781US8755680B2Edge ring for a thermal processing chamberKOELMEL BLAKE·Filed 2012·Granted Jun 17, 2014·3 cites·20 claims
- 0878US8490660B2Apparatus and method for supporting, positioning and rotating a substrate in a processing chamberKOELMEL BLAKE·Filed 2011·Granted Jul 23, 2013·3 cites·14 claims
- 0975US8309475B2Apparatus and method of aligning and positioning a cold substrate on a hot surfaceKOELMEL BLAKE·Filed 2012·Granted Nov 13, 2012·2 cites·19 claims
- 1067US8097543B2Apparatus and method of aligning and positioning a cold substrate on a hot surfaceKOELMEL BLAKE·Filed 2010·Granted Jan 17, 2012·1 cites·18 claims
- 1155US2009181553A1Apparatus and method of aligning and positioning a cold substrate on a hot surfaceKOELMEL BLAKE·Filed 2008·Application pending·0 cites
- 1239US2012309115A1Apparatus and methods for supporting and controlling a substrateKOELMEL BLAKE·Filed 2011·Application pending·0 cites
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