Assignee
KOBATA ITSUKI
JP·1 granted patent·6 pending applications·2 citations·filing 2003–2011
Top patents by PatentIndex Score
7 records- 0169US9401293B2Polishing apparatus and polishing methodKOBATA ITSUKI·Filed 2011·Granted Jul 26, 2016·2 cites·24 claims
- 0245US2007187259A1Substrate processing apparatus and methodKOBATA ITSUKI·Filed 2007·Application pending·0 cites
- 0340US2008188162A1Electrochemical mechanical polishing apparatus conditioning method, and conditioning solutionKOBATA ITSUKI·Filed 2008·Application pending·0 cites
- 0440US2009078583A1Electrochemical mechanical polishing method and electrochemical mechanical polishing apparatusKOBATA ITSUKI·Filed 2008·Application pending·0 cites
- 0537US2007135024A1Polishing pad and polishing apparatusKOBATA ITSUKI·Filed 2006·Application pending·0 cites
- 0633US2006289298A1Electrolytic processing apparatus and methodKOBATA ITSUKI·Filed 2004·Application pending·0 cites
- 0730US2006144711A1Electrochemical machining device and electrochemical machining methodKOBATA ITSUKI·Filed 2003·Application pending·0 cites
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