Assignee
KLEINSCHMIDT JUERGEN
DE·2 granted patents·1 citations·filing 2011–2011
Technology mixH05G2
Top patents by PatentIndex Score
2 records- 0150US8546775B2Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasmaKLEINSCHMIDT JUERGEN·Filed 2011·Granted Oct 1, 2013·1 cites·16 claims
- 0234US8426834B2Method and apparatus for the generation of EUV radiation from a gas discharge plasmaKLEINSCHMIDT JUERGEN·Filed 2011·Granted Apr 23, 2013·0 cites·16 claims
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