Assignee
KLA TENCOR
US·22 granted patents·1,713 citations·filing 1998–2007
Top patents by PatentIndex Score
22 records- 0198US6771806B1Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devicesKLA TENCOR·Filed 2000·Granted Aug 3, 2004·258 cites·27 claims
- 0297US7655482B2Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2007·Granted Feb 2, 2010·91 cites·10 claims
- 0396US6636064B1Dual probe test structures for semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Oct 21, 2003·127 cites·22 claims
- 0496US6633174B1Stepper type test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Oct 14, 2003·195 cites·14 claims
- 0595US6529621B1Mechanisms for making and inspecting reticlesKLA TENCOR·Filed 1998·Granted Mar 4, 2003·135 cites·38 claims
- 0695US6524873B1Continuous movement scans of test structures on semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Feb 25, 2003·102 cites·23 claims
- 0794US6586733B1Apparatus and methods for secondary electron emission microscope with dual beamKLA TENCOR·Filed 2000·Granted Jul 1, 2003·46 cites·21 claims
- 0893US6748103B2Mechanisms for making and inspecting reticlesKLA TENCOR·Filed 2003·Granted Jun 8, 2004·45 cites·26 claims
- 0993US6066849AScanning electron beam microscopeKLA TENCOR·Filed 1998·Granted May 23, 2000·103 cites·27 claims
- 1092US6566885B1Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted May 20, 2003·57 cites·24 claims
- 1192US6528818B1Test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Mar 4, 2003·60 cites·19 claims
- 1291US7179661B1Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2000·Granted Feb 20, 2007·68 cites·14 claims
- 1391US7106895B1Method and apparatus for inspecting reticles implementing parallel processingKLA TENCOR·Filed 1999·Granted Sep 12, 2006·122 cites·45 claims
- 1491US6671051B1Apparatus and methods for detecting killer particles during chemical mechanical polishingKLA TENCOR·Filed 2000·Granted Dec 30, 2003·49 cites·37 claims
- 1591US6664546B1In-situ probe for optimizing electron beam inspection and metrology based on surface potentialKLA TENCOR·Filed 2000·Granted Dec 16, 2003·49 cites·31 claims
- 1688US6581193B1Apparatus and methods for modeling process effects and imaging effects in scanning electron microscopyKLA TENCOR·Filed 2001·Granted Jun 17, 2003·61 cites·32 claims
- 1787US7102749B2Overlay alignment mark designKLA TENCOR·Filed 2005·Granted Sep 5, 2006·6 cites·24 claims
- 1886US6628397B1Apparatus and methods for performing self-clearing optical measurementsKLA TENCOR·Filed 1999·Granted Sep 30, 2003·68 cites·27 claims
- 1985US6362923B1Lens for microscopic inspectionKLA TENCOR·Filed 2000·Granted Mar 26, 2002·36 cites·30 claims
- 2072US7486393B2Multiple beam inspection apparatus and methodKLA TENCOR·Filed 2007·Granted Feb 3, 2009·2 cites·19 claims
- 2164US7724939B2Method and apparatus for inspecting reticles implementing parallel processingKLA TENCOR·Filed 2006·Granted May 25, 2010·3 cites·12 claims
- 2263US6516085B1Apparatus and methods for collecting global data during a reticle inspectionKLA TENCOR·Filed 1999·Granted Feb 4, 2003·30 cites·29 claims
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