Assignee
KITAMURA TSUYOSHI
JP·3 granted patents·16 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0184US9945250B2Aircraft gas turbineKITAMURA TSUYOSHI·Filed 2011·Granted Apr 17, 2018·15 cites·2 claims
- 0269US9233512B2Manufacturing method of blazed diffraction grating and mold for making a blazed difraction gratingKITAMURA TSUYOSHI·Filed 2012·Granted Jan 12, 2016·1 cites·10 claims
- 0348US8163467B2Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing methodKITAMURA TSUYOSHI·Filed 2009·Granted Apr 24, 2012·0 cites·5 claims
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