Assignee
KIMURA YOSHIKI
JP·2 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0183US8892242B2Robot systemKIMURA YOSHIKI·Filed 2012·Granted Nov 18, 2014·7 cites·20 claims
- 0279US8401701B2Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the sameKIMURA YOSHIKI·Filed 2009·Granted Mar 19, 2013·7 cites·14 claims
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