Assignee
KIM HONGSEUB
KR·3 granted patents·1 pending application·6 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0170US8604697B2Apparatus for generating plasmaKIM HONGSEUB·Filed 2010·Granted Dec 10, 2013·4 cites·18 claims
- 0257US8264153B2Plasma source for large size substrateKIM HONGSEUB·Filed 2010·Granted Sep 11, 2012·2 cites·6 claims
- 0333US8425719B2Plasma generating apparatusKIM HONGSEUB·Filed 2010·Granted Apr 23, 2013·0 cites·19 claims
- 0432US2012231631A1Plasma generating apparatus and plasma etching method using the sameKIM HONGSEUB·Filed 2012·Application pending·0 cites
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