Assignee
KEMMOKU HIROMI
JP·3 granted patents·0 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0148US8422623B2Exposure apparatus and device manufacturing methodKEMMOKU HIROMI·Filed 2006·Granted Apr 16, 2013·0 cites·11 claims
- 0245US8416389B2Exposure apparatus and method of manufacturing deviceKEMMOKU HIROMI·Filed 2009·Granted Apr 9, 2013·0 cites·5 claims
- 0333US8300209B2Exposure method, exposure apparatus, and device manufacturing methodKEMMOKU HIROMI·Filed 2010·Granted Oct 30, 2012·0 cites·9 claims
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