Assignee
KAWAMOTO TOMOKAZU
JP·2 granted patents·536 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0193US8393091B2Substrate processing method, and method of manufacturing semiconductor deviceKAWAMOTO TOMOKAZU·Filed 2011·Granted Mar 12, 2013·535 cites·3 claims
- 0261US8598023B2Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor deviceKAWAMOTO TOMOKAZU·Filed 2012·Granted Dec 3, 2013·1 cites·3 claims
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