Assignee
KATO MITSURU
JP·2 granted patents·2 pending applications·14 citations·filing 2006–2012
Top patents by PatentIndex Score
4 records- 0186US8211543B2Cushion for polishing pad and polishing pad using the cushionKATO MITSURU·Filed 2008·Granted Jul 3, 2012·14 cites·24 claims
- 0250US8308527B2Metal film polishing pad and method for polishing metal film using the sameKATO MITSURU·Filed 2008·Granted Nov 13, 2012·0 cites·22 claims
- 0340US2008289909A1Elevator Shock AbsorberKATO MITSURU·Filed 2006·Application pending·0 cites
- 0435US2014154884A1Erosion inhibitor for chemical mechanical polishing, slurry for chemical mechanical polishing, and chemical mechanical polishing methodKATO MITSURU·Filed 2012·Application pending·0 cites
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