Assignee
KANEYAMA KOJI
JP·6 granted patents·6 pending applications·17 citations·filing 2006–2013
Top patents by PatentIndex Score
12 records- 0187US8496761B2Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2010·Granted Jul 30, 2013·5 cites·7 claims
- 0278US9064914B2Method of and apparatus for heat-treating exposed substrateKANEYAMA KOJI·Filed 2011·Granted Jun 23, 2015·4 cites·7 claims
- 0375US8635968B2Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2011·Granted Jan 28, 2014·3 cites·8 claims
- 0474US8540824B2Substrate processing methodKANEYAMA KOJI·Filed 2010·Granted Sep 24, 2013·3 cites·10 claims
- 0569US8932672B2Substrate processing apparatusKANEYAMA KOJI·Filed 2009·Granted Jan 13, 2015·2 cites·8 claims
- 0653US8851769B2Substrate processing methodKANEYAMA KOJI·Filed 2013·Granted Oct 7, 2014·0 cites·10 claims
- 0752US2007190437A1Substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 0851US2008016714A1Substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 0949US2007071439A1Substrate processing apparatusKANEYAMA KOJI·Filed 2006·Application pending·0 cites
- 1044US2007274711A1Substrate processing apparatus and substrate processing methodKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 1144US2007253710A1Method of processing substrate, substrate processing system and substrate processing apparatusKANEYAMA KOJI·Filed 2007·Application pending·0 cites
- 1243US2007147831A1Substrate processing apparatus for performing exposure processKANEYAMA KOJI·Filed 2006·Application pending·0 cites
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