Assignee
KANAYA YUHO
JP·12 granted patents·2 pending applications·67 citations·filing 2008–2011
Top patents by PatentIndex Score
14 records- 0194US8786829B2Exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Jul 22, 2014·25 cites·20 claims
- 0289US8665455B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Mar 4, 2014·12 cites·14 claims
- 0389US8243257B2Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring methodKANAYA YUHO·Filed 2008·Granted Aug 14, 2012·12 cites·29 claims
- 0486US8098362B2Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Jan 17, 2012·7 cites·20 claims
- 0578US8085385B2Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatusKANAYA YUHO·Filed 2008·Granted Dec 27, 2011·4 cites·30 claims
- 0676US8228482B2Exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Jul 24, 2012·4 cites·22 claims
- 0767US8547527B2Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Oct 1, 2013·2 cites·24 claims
- 0864US8817236B2Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing methodKANAYA YUHO·Filed 2009·Granted Aug 26, 2014·1 cites·21 claims
- 0952US8792086B2Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatusKANAYA YUHO·Filed 2011·Granted Jul 29, 2014·0 cites·10 claims
- 1051US2012086927A1Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing methodKANAYA YUHO·Filed 2011·Application pending·0 cites
- 1147US9256140B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z directionKANAYA YUHO·Filed 2008·Granted Feb 9, 2016·0 cites·32 claims
- 1247US9013681B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Apr 21, 2015·0 cites·33 claims
- 1347US8422015B2Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2008·Granted Apr 16, 2013·0 cites·11 claims
- 1439US2014022377A1Mark detection method, exposure method and exposure apparatus, and device manufacturing methodKANAYA YUHO·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →