Assignee
JUNG HYE-SON
KR·1 granted patent·1 pending application·0 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0134US8123900B2Substrate supporting unit and apparatus for treating substrate using the substrate supporting unitJUNG HYE-SON·Filed 2008·Granted Feb 28, 2012·0 cites·14 claims
- 0228US2009095323A1Valve with sensor for process solution, and apparatus and method for treating substrate using the sameJUNG HYE-SON·Filed 2008·Application pending·0 cites
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