Assignee
JOHNSON KENNETH CARLISLE
US·3 granted patents·1 citations·filing 2016–2021
Top patents by PatentIndex Score
3 records- 0164US10025079B2Actinic, spot-scanning microscope for EUV mask inspection and metrologyJOHNSON KENNETH CARLISLE·Filed 2016·Granted Jul 17, 2018·1 cites·7 claims
- 0257US11561476B1UV lithography systemJOHNSON KENNETH CARLISLE·Filed 2021·Granted Jan 24, 2023·0 cites·10 claims
- 0357US11520235B2EUV lithography system with diffraction opticsJOHNSON KENNETH CARLISLE·Filed 2020·Granted Dec 6, 2022·0 cites·25 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →