Assignee
JETEK INC
US·4 granted patents·70 citations·filing 2000–2003
Top patents by PatentIndex Score
4 records- 0181US6467297B1Wafer holder for rotating and translating wafersJETEK INC·Filed 2000·Granted Oct 22, 2002·30 cites·11 claims
- 0268US6762136B1Method for rapid thermal processing of substratesJETEK INC·Filed 2000·Granted Jul 13, 2004·14 cites·22 claims
- 0364US6955991B2Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holesJETEK INC·Filed 2003·Granted Oct 18, 2005·10 cites·12 claims
- 0462US6492613B2System for precision control of the position of an atmospheric plasmaJETEK INC·Filed 2001·Granted Dec 10, 2002·16 cites·17 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →