Assignee
JENSEN EARL
CA·5 granted patents·25 citations·filing 2010–2013
Top patents by PatentIndex Score
5 records- 0185US8889021B2Process condition sensing device and method for plasma chamberJENSEN EARL·Filed 2010·Granted Nov 18, 2014·6 cites·11 claims
- 0279US9356822B2Automated interface apparatus and method for use in semiconductor wafer handling systemsJENSEN EARL·Filed 2012·Granted May 31, 2016·10 cites·31 claims
- 0378US9304160B1Defect inspection apparatus, system, and methodJENSEN EARL·Filed 2013·Granted Apr 5, 2016·4 cites·23 claims
- 0470US9360302B2Film thickness monitorJENSEN EARL·Filed 2012·Granted Jun 7, 2016·3 cites·18 claims
- 0569US9140604B2Wafer level spectrometerJENSEN EARL·Filed 2012·Granted Sep 22, 2015·2 cites·32 claims
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