Assignee
ITO HIROHITO
JP·3 granted patents·14 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0187US8562323B2Imprint apparatus and method for producing articleITO HIROHITO·Filed 2010·Granted Oct 22, 2013·7 cites·18 claims
- 0278US8625077B2Positioning apparatus, exposure apparatus, and device manufacturing methodITO HIROHITO·Filed 2011·Granted Jan 7, 2014·4 cites·20 claims
- 0377US8618516B2Charged-particle beam exposure apparatus and method of manufacturing articleITO HIROHITO·Filed 2011·Granted Dec 31, 2013·3 cites·6 claims
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