Assignee
ISHIZU HIDEO
JP·2 granted patents·30 citations·filing 2005–2010
Top patents by PatentIndex Score
2 records- 0189US8064233B2Power supply regulating apparatus, semiconductor manufacturing apparatus, method for controlling power to heater, and method for manufacturing semiconductor deviceISHIZU HIDEO·Filed 2005·Granted Nov 22, 2011·28 cites·9 claims
- 0263US9117862B2Substrate processing apparatus, processing tube, substrate holder, fixing part of the substrate holder, substrate processing method, and substrate manufacturing methodISHIZU HIDEO·Filed 2010·Granted Aug 25, 2015·2 cites·10 claims
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