Assignee
IRIE MAKIKO
JP·5 granted patents·12 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0183US8263307B2Positive resist composition and method of forming resist patternIRIE MAKIKO·Filed 2009·Granted Sep 11, 2012·7 cites·6 claims
- 0254US8192914B2Resist composition for immersion exposure and method of forming resist patternIRIE MAKIKO·Filed 2006·Granted Jun 5, 2012·4 cites·4 claims
- 0351US8574813B2Resist composition for immersion exposure and method of forming resist patternIRIE MAKIKO·Filed 2012·Granted Nov 5, 2013·1 cites·10 claims
- 0446US8916332B2Resist composition, method of forming resist pattern, and polymeric compoundIRIE MAKIKO·Filed 2012·Granted Dec 23, 2014·0 cites·3 claims
- 0545US8394569B2Resist composition for immersion lithography and method for forming resist patternIRIE MAKIKO·Filed 2007·Granted Mar 12, 2013·0 cites·9 claims
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