Assignee
ION BEAM SERVICES
FR·8 granted patents·5 pending applications·5 citations·filing 2012–2019
Top patents by PatentIndex Score
13 records- 0169US9524853B2Ion implantation machine presenting increased productivityION BEAM SERVICES·Filed 2014·Granted Dec 20, 2016·2 cites·12 claims
- 0263US9520274B2Ion implanter provided with a plurality of plasma source bodiesION BEAM SERVICES·Filed 2013·Granted Dec 13, 2016·1 cites·7 claims
- 0362US9035269B2Control module for an ion implanterION BEAM SERVICES·Filed 2012·Granted May 19, 2015·1 cites·10 claims
- 0460US9552962B2Method of controlling an ion implanter in plasma immersion modeION BEAM SERVICES·Filed 2012·Granted Jan 24, 2017·1 cites·7 claims
- 0559US2016225921A1Method for producing a contact structure of a photovoltaic cell and photovoltaic cellION BEAM SERVICES·Filed 2014·Application pending·0 cites
- 0647US12266692B2Device for improving the mobility of carriers in a MOSFET channel on silicon carbideION BEAM SERVICES·Filed 2019·Granted Apr 1, 2025·0 cites·17 claims
- 0744US2019164761A1Method for doping silicon sheetsION BEAM SERVICES·Filed 2019·Application pending·0 cites
- 0842US10923325B2Method of controlling an implanter operating in plasma immersionION BEAM SERVICES·Filed 2016·Granted Feb 16, 2021·0 cites·5 claims
- 0942US2016204299A1Method for doping silicon sheetsION BEAM SERVICES·Filed 2014·Application pending·0 cites
- 1040US11053582B2Support including an electrostatic substrate carrierION BEAM SERVICES·Filed 2012·Granted Jul 6, 2021·0 cites·11 claims
- 1140US9922856B2Electrostatic heating substrate holder which is polarised at high voltageION BEAM SERVICES·Filed 2015·Granted Mar 20, 2018·0 cites·8 claims
- 1239US2017051401A1Method for installing a gas diffusion deviceION BEAM SERVICES·Filed 2015·Application pending·0 cites
- 1332US2018031319A1A method of stabilizing a substrate and a machine for performing the methodION BEAM SERVICES·Filed 2016·Application pending·0 cites
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