Assignee
INTEGRATED SENSING SYSTEMS ISS
US·2 granted patents·258 citations·filing 1999–1999
Top patents by PatentIndex Score
2 records- 0194US6499354B1Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devicesINTEGRATED SENSING SYSTEMS ISS·Filed 1999·Granted Dec 31, 2002·136 cites·50 claims
- 0291US6338284B1Electrical feedthrough structures for micromachined devices and methods of fabricating the sameINTEGRATED SENSING SYSTEMS ISS·Filed 1999·Granted Jan 15, 2002·122 cites·20 claims
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