Assignee
INTEGRATED DYNAMICS ENG GMBH
DE·27 granted patents·8 pending applications·167 citations·filing 2000–2024
Top patents by PatentIndex Score
35 records- 0191US7264436B2Robot-guidance assembly for providing a precision motion of an objectINTEGRATED DYNAMICS ENG GMBH·Filed 2005·Granted Sep 4, 2007·22 cites·15 claims
- 0285US7942379B2Active vibration isolation system with a combined position actuatorINTEGRATED DYNAMICS ENG GMBH·Filed 2007·Granted May 17, 2011·11 cites·10 claims
- 0382US9618076B2Stationary vibration isolation system and method for controlling a vibration isolation systemINTEGRATED DYNAMICS ENG GMBH·Filed 2014·Granted Apr 11, 2017·10 cites·19 claims
- 0480US6468022B1Edge-gripping pre-alignerINTEGRATED DYNAMICS ENG GMBH·Filed 2000·Granted Oct 22, 2002·47 cites·16 claims
- 0579US7400392B2Apparatus for handling of a disklike member, especially for handling of a waferINTEGRATED DYNAMICS ENG GMBH·Filed 2005·Granted Jul 15, 2008·7 cites·12 claims
- 0679US7234913B2Fast swapping station for wafer transportINTEGRATED DYNAMICS ENG GMBH·Filed 2004·Granted Jun 26, 2007·22 cites·35 claims
- 0777US7859259B2Magnetic filed compensation system with increased bandwidthINTEGRATED DYNAMICS ENG GMBH·Filed 2007·Granted Dec 28, 2010·8 cites·23 claims
- 0876US2024357784A1Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machineINTEGRATED DYNAMICS ENG GMBH·Filed 2024·Application pending·0 cites
- 0972US10322919B2Maintenance apparatusINTEGRATED DYNAMICS ENG GMBH·Filed 2017·Granted Jun 18, 2019·2 cites·12 claims
- 1069US7075772B2Electrostatic gripping deviceINTEGRATED DYNAMICS ENG GMBH·Filed 2003·Granted Jul 11, 2006·12 cites·19 claims
- 1166US8352086B2Combined motion sensor for use in feedback control systems for vibration isolationINTEGRATED DYNAMICS ENG GMBH·Filed 2010·Granted Jan 8, 2013·1 cites·14 claims
- 1266US7489987B2Control of an active vibration isolation systemINTEGRATED DYNAMICS ENG GMBH·Filed 2006·Granted Feb 10, 2009·4 cites·10 claims
- 1365US10480609B2Pneumatic actuator and method for operating an active vibration isolation systemINTEGRATED DYNAMICS ENG GMBH·Filed 2017·Granted Nov 19, 2019·1 cites·12 claims
- 1464US12063745B2Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machineINTEGRATED DYNAMICS ENG GMBH·Filed 2021·Granted Aug 13, 2024·0 cites·13 claims
- 1563US10634210B2Isolator for a stationary vibration isolation systemINTEGRATED DYNAMICS ENG GMBH·Filed 2017·Granted Apr 28, 2020·1 cites·5 claims
- 1663US9869364B2Vibration isolator with pneumatic springINTEGRATED DYNAMICS ENG GMBH·Filed 2015·Granted Jan 16, 2018·1 cites·10 claims
- 1760US7290642B2Magnetic spring device with negative stiffnessINTEGRATED DYNAMICS ENG GMBH·Filed 2003·Granted Nov 6, 2007·8 cites·16 claims
- 1859US7715948B2Method and apparatus for regulating vibration isolation systemsINTEGRATED DYNAMICS ENG GMBH·Filed 2007·Granted May 11, 2010·2 cites·11 claims
- 1958US2025029807A1Apparatus and method for analysing a sample by means of electrically charged particlesINTEGRATED DYNAMICS ENG GMBH·Filed 2022·Application pending·0 cites
- 2056US7991566B2Device for monitoring the relative positions of several devicesINTEGRATED DYNAMICS ENG GMBH·Filed 2006·Granted Aug 2, 2011·2 cites·13 claims
- 2155US7822509B2Control system for active vibration isolation of a supported payloadINTEGRATED DYNAMICS ENG GMBH·Filed 2008·Granted Oct 26, 2010·2 cites·10 claims
- 2255US7269995B2Method and apparatus of vibration isolation, in particular for electron beam metrology toolsINTEGRATED DYNAMICS ENG GMBH·Filed 2004·Granted Sep 18, 2007·2 cites·15 claims
- 2352US12444634B2Device and method for imaging an object in at least two viewsINTEGRATED DYNAMICS ENG GMBH·Filed 2021·Granted Oct 14, 2025·0 cites·27 claims
- 2452US10941833B2Vibration isolator with a vertically effective pneumatic springINTEGRATED DYNAMICS ENG GMBH·Filed 2016·Granted Mar 9, 2021·0 cites·12 claims
- 2551US11953073B2Vibration isolation system with one or more magnetic actuatorsINTEGRATED DYNAMICS ENG GMBH·Filed 2020·Granted Apr 9, 2024·0 cites·20 claims
- 2650US9683621B2Active absorber for low-frequency vibrating structuresINTEGRATED DYNAMICS ENG GMBH·Filed 2013·Granted Jun 20, 2017·1 cites·14 claims
- 2749US9458908B2Vibration isolation system with support divided into sections, and method for controlling sameINTEGRATED DYNAMICS ENG GMBH·Filed 2014·Granted Oct 4, 2016·1 cites·13 claims
- 2849US2008006759A1Active vibration isolation system with improved sensor/actuator matchingINTEGRATED DYNAMICS ENG GMBH·Filed 2007·Application pending·0 cites
- 2949US2025283520A1Vibration isolator having a coil spring and an actuatorINTEGRATED DYNAMICS ENG GMBH·Filed 2023·Application pending·0 cites
- 3048US2025102096A1Compensation element, method and system for the active damping of a mediumINTEGRATED DYNAMICS ENG GMBH·Filed 2023·Application pending·0 cites
- 3146US9500244B2Vibration isolator with coil springINTEGRATED DYNAMICS ENG GMBH·Filed 2014·Granted Nov 22, 2016·0 cites·9 claims
- 3240US2008091297A2Method and apparatus for receiving and/or transporting substratesINTEGRATED DYNAMICS ENG GMBH·Filed 2007·Application pending·0 cites
- 3334US12181014B2Stationary vibration isolation system and control method thereofINTEGRATED DYNAMICS ENG GMBH·Filed 2020·Granted Dec 31, 2024·0 cites·13 claims
- 3430US2018155126A1Service cartINTEGRATED DYNAMICS ENG GMBH·Filed 2016·Application pending·0 cites
- 3530US2003077162A1Edge gripping prealignerINTEGRATED DYNAMICS ENG GMBH·Filed 2002·Application pending·0 cites
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