Assignee
INSPEX INC
US·12 granted patents·618 citations·filing 1986–2001
Top patents by PatentIndex Score
12 records- 0190US4772126AParticle detection method and apparatusINSPEX INC·Filed 1986·Granted Sep 20, 1988·73 cites·26 claims
- 0289US6774991B1Method and apparatus for inspecting a patterned semiconductor waferINSPEX INC·Filed 2000·Granted Aug 10, 2004·54 cites·17 claims
- 0388US5317380AParticle detection method and apparatusINSPEX INC·Filed 1991·Granted May 31, 1994·85 cites·26 claims
- 0487US6621570B1Method and apparatus for inspecting a patterned semiconductor waferINSPEX INC·Filed 2000·Granted Sep 16, 2003·47 cites·10 claims
- 0586US5805278AParticle detection method and apparatusINSPEX INC·Filed 1996·Granted Sep 8, 1998·84 cites·22 claims
- 0686US4895446AParticle detection method and apparatusINSPEX INC·Filed 1988·Granted Jan 23, 1990·60 cites·6 claims
- 0783US5659390AMethod and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patternsINSPEX INC·Filed 1995·Granted Aug 19, 1997·59 cites·5 claims
- 0875US6643006B1Method and system for reviewing a semiconductor wafer using at least one defect sampling conditionINSPEX INC·Filed 2001·Granted Nov 4, 2003·18 cites·28 claims
- 0972US6028664AMethod and system for establishing a common reference point on a semiconductor wafer inspected by two or more scanning mechanismsINSPEX INC·Filed 1997·Granted Feb 22, 2000·46 cites·11 claims
- 1065US5667353ARobot systemINSPEX INC·Filed 1995·Granted Sep 16, 1997·41 cites·9 claims
- 1155US5742422AAdjustable fourier maskINSPEX INC·Filed 1995·Granted Apr 21, 1998·23 cites·12 claims
- 1248US6097428AMethod and apparatus for inspecting a semiconductor wafer using a dynamic thresholdINSPEX INC·Filed 1997·Granted Aug 1, 2000·28 cites·4 claims
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