Assignee
INFOVION INC
KR·1 granted patent·3 pending applications·0 citations·filing 2022–2025
Top patents by PatentIndex Score
4 records- 0170US2026018390A1Apparatus and method for atomic layer etching based on control of charged particlesINFOVION INC·Filed 2025·Application pending·0 cites
- 0257US12540386B2Electron-beam-assisted sputtering device and method thereforINFOVION INC·Filed 2022·Granted Feb 3, 2026·0 cites·20 claims
- 0355US2025028234A1Pellicle for extreme ultraviolet lithography and method for manufacturing sameINFOVION INC·Filed 2022·Application pending·0 cites
- 0452US2026004990A1Linear tcp source, a charged particle beam source using the linear tcp source and a grid for the charged particle beam sourceINFOVION INC·Filed 2023·Application pending·0 cites
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