Assignee
INFICON INC
US·38 granted patents·15 pending applications·94 citations·filing 2001–2025
Top patents by PatentIndex Score
53 records- 0187US10175198B2System and method for optimal chemical analysisINFICON INC·Filed 2017·Granted Jan 8, 2019·9 cites·20 claims
- 0286US11929270B2Unconsumed precursor monitoringINFICON INC·Filed 2022·Granted Mar 12, 2024·2 cites·22 claims
- 0384US9182378B2High capacity monitor crystal exchanger utilizing an organized 3-D storage structureINFICON INC·Filed 2013·Granted Nov 10, 2015·5 cites·39 claims
- 0479USD978662SSensor packageINFICON INC·Filed 2020·Granted Feb 21, 2023·13 cites·1 claims
- 0579US11335575B2Unconsumed precursor monitoringINFICON INC·Filed 2018·Granted May 17, 2022·4 cites·22 claims
- 0678US10502651B2Creating a mini environment for gas analysisINFICON INC·Filed 2016·Granted Dec 10, 2019·3 cites·26 claims
- 0777US10047437B2Process gas management system and photoionization detectorINFICON INC·Filed 2016·Granted Aug 14, 2018·1 cites·19 claims
- 0875US11841354B2Method for displaying concentration data of a substance and an associated apparatusINFICON INC·Filed 2019·Granted Dec 12, 2023·1 cites·15 claims
- 0975US10704150B2Monitoring thin film depositionINFICON INC·Filed 2014·Granted Jul 7, 2020·1 cites·7 claims
- 1074US12276649B2Method for displaying concentration data of a substance and an associated apparatusINFICON INC·Filed 2023·Granted Apr 15, 2025·0 cites·13 claims
- 1173US7041984B2Replaceable anode liner for ion sourceINFICON INC·Filed 2004·Granted May 9, 2006·11 cites·35 claims
- 1272US9645125B2Vacuum chamber measurement using residual gas analyzerINFICON INC·Filed 2013·Granted May 9, 2017·3 cites·20 claims
- 1372US7257494B2Inter-process sensing of wafer outcomeINFICON INC·Filed 2005·Granted Aug 14, 2007·7 cites·14 claims
- 1467US11784031B2Method of detecting radicals using mass spectrometryINFICON INC·Filed 2022·Granted Oct 10, 2023·0 cites·11 claims
- 1567US10755909B2Chemical analysis device and methodINFICON INC·Filed 2019·Granted Aug 25, 2020·1 cites·20 claims
- 1665US2025369866A1Particle detectorINFICON INC·Filed 2025·Application pending·0 cites
- 1765US2025285855A1Multiple flow path gas inlet with integrated heating and temperature controlINFICON INC·Filed 2025·Application pending·0 cites
- 1863US7821250B2RF sensor clamp assemblyINFICON INC·Filed 2006·Granted Oct 26, 2010·4 cites·28 claims
- 1962US12227846B2Monitoring thin film depositionINFICON INC·Filed 2020·Granted Feb 18, 2025·0 cites·6 claims
- 2062US11569079B2Gas analyzer and membranes thereforINFICON INC·Filed 2021·Granted Jan 31, 2023·0 cites·24 claims
- 2162US9506895B2Combined crystal retainer and contact system for deposition monitor sensorsINFICON INC·Filed 2013·Granted Nov 29, 2016·1 cites·19 claims
- 2262US7538562B2High performance miniature RF sensor for use in microelectronics plasma processing toolsINFICON INC·Filed 2007·Granted May 26, 2009·6 cites·21 claims
- 2362US2025290778A1Metalized plastic heat shield enclosure for heated inlet manifoldINFICON INC·Filed 2025·Application pending·0 cites
- 2461US2025093310A1Method and system for injecting an internal standard into a portable gas analyzer system and an associated reusable sample cartridgeINFICON INC·Filed 2024·Application pending·0 cites
- 2560US12494358B2Ion source assembly with multiple elliptical filamentsINFICON INC·Filed 2022·Granted Dec 9, 2025·0 cites·17 claims
- 2660US11282687B2Chemical analysis device and methodINFICON INC·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
- 2760US2024402128A1Qcm sensorINFICON INC·Filed 2024·Application pending·0 cites
- 2858US6642641B2Apparatus for measuring total pressure and partial pressure with common electron beamINFICON INC·Filed 2001·Granted Nov 4, 2003·4 cites·19 claims
- 2957US12198897B2HTCC antenna for generation of microplasmaINFICON INC·Filed 2021·Granted Jan 14, 2025·0 cites·23 claims
- 3057US12106953B2Wide range electron impact ion source for a mass spectrometerINFICON INC·Filed 2022·Granted Oct 1, 2024·0 cites·16 claims
- 3157US10985000B2Chemical analyzer with membraneINFICON INC·Filed 2018·Granted Apr 20, 2021·0 cites·18 claims
- 3256US6476612B1Louvered beam stop for lowering x-ray limit of a total pressure gaugeINFICON INC·Filed 2001·Granted Nov 5, 2002·3 cites·10 claims
- 3355US2016225597A1Chemical analyzer with membraneINFICON INC·Filed 2014·Application pending·0 cites
- 3454US6991110B2Package for storing sensor crystals and related method of useINFICON INC·Filed 2003·Granted Jan 31, 2006·7 cites·16 claims
- 3553US11658020B2Ion source assembly with multiple ionization volumes for use in a mass spectrometerINFICON INC·Filed 2021·Granted May 23, 2023·0 cites·18 claims
- 3651US12577675B2System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensorsINFICON INC·Filed 2022·Granted Mar 17, 2026·0 cites·19 claims
- 3751US6906799B2Signal processing method for in-situ, scanned-beam particle monitoringINFICON INC·Filed 2002·Granted Jun 14, 2005·6 cites·33 claims
- 3851US2026005074A1Real-time computer vision end-point detection pipelineINFICON INC·Filed 2025·Application pending·0 cites
- 3950US11175323B2Process monitoring using crystal with reactance sensorINFICON INC·Filed 2017·Granted Nov 16, 2021·0 cites·17 claims
- 4049US2024242141A1Method of optimizing equipment maintenance and associated systemINFICON INC·Filed 2022·Application pending·0 cites
- 4149US2024329001A1Quartz crystal microbalance (qcm) sensor having rapid registration responseINFICON INC·Filed 2022·Application pending·0 cites
- 4249US2024241083A1System and method for deconvolution of real-time mass from the influence of temperature and pressure on crystal microbalanceINFICON INC·Filed 2022·Application pending·0 cites
- 4348US11875984B2Time-of-flight mass spectrometer assembly with a secondary flangeINFICON INC·Filed 2022·Granted Jan 16, 2024·0 cites·19 claims
- 4448US8916822B2Dual-detection residual gas analyzerINFICON INC·Filed 2013·Granted Dec 23, 2014·0 cites·20 claims
- 4548US7728250B2RF sensor clamp assemblyINFICON INC·Filed 2004·Granted Jun 1, 2010·2 cites·48 claims
- 4646US9217663B2Multi-chambered acoustic sensor for determination gas compositionINFICON INC·Filed 2012·Granted Dec 22, 2015·0 cites·14 claims
- 4743US12347667B2Method of auto tuning one or more sensorsINFICON INC·Filed 2023·Granted Jul 1, 2025·0 cites·14 claims
- 4843US12266552B2System and method for monitoring semiconductor processesINFICON INC·Filed 2021·Granted Apr 1, 2025·0 cites·26 claims
- 4941US2024183446A1Sealing system for components of a gas analyzerINFICON INC·Filed 2022·Application pending·0 cites
- 5041US2024153753A1Atmospheric pressure ionization coupled to an electron ionization mass spectrometerINFICON INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
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