Assignee
IMAOKA NOBUO
JP·2 granted patents·1 pending application·4 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0159US8928882B2Measurement apparatus, exposure apparatus, and device fabrication methodIMAOKA NOBUO·Filed 2012·Granted Jan 6, 2015·2 cites·5 claims
- 0255US8149385B2Alignment unit and exposure apparatusIMAOKA NOBUO·Filed 2009·Granted Apr 3, 2012·2 cites·6 claims
- 0327US2011294071A1Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatusIMAOKA NOBUO·Filed 2011·Application pending·0 cites
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